The POU3500 system features dynamic temperature control of the method chamber cathode / electrode / anode and can be synchronized with any etch course of action.

Tool & TCU software program calibration techniques differ external take a look at equipment not applied often for verifying

the data below is categorized by semiconductor approach and Resource manufacturer. Every single desk contains an Applications Matrix that exhibits qulified and commercial processes.

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LAUDA-Noah will, to get a purchaser's retrofit analysis, monitor and regulate its fluid temperature Handle profiles to match an present TCUs' if you want to ensure a sleek process integration by Noohapou using DAQ.

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The precision from the POU 3500 permits unbiased Charge of the method fluid temperature towards the wafer chuck in +/- 0.1 °C of established place, and the rapid reaction time in the technique makes it possible for for maximum wafer-to-wafer repeatability throughout the etch approach.

With our device strategically mounted close to six ft in the chamber, we achieve a way more exact reading on the chuck temperature. This strategy ensures constant temperature through the entire manufacturing whole lot, bringing about improved wafer-to-wafer CD uniformity.

the info pertains to a 300mm chamber temperature profile in the course of a higher aspect ratio Etch course of action, working at very higher RF electrical power circumstances (~three.8kW). The compelling facets of this information set are:

LAUDA-Noah is meeting these new challenges and has integrated Power conserving technological know-how in devices which can be helpful into the setting and also have a inexpensive to function.

the information established here is from a 200mm quantity creation wafer fab and Evidently illustrates the advantage of the LAUDA-Noah POU process.

in excess of at any time, shrinking unit geometries, demanding new processes in addition to a extremely aggressive natural environment require temperature Command techniques that Incorporate speedy and correct temperature Regulate with the emphasis on diminished working prices and improved reliability.

verified; TEs' signify just one Element of a chiller's layout. The switching & Command strategies used by a chiller will affect the TEs' dependability.

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